Lub tshuab luam theej laser, tseem hu ua laser galvanometer, muaj lub taub hau luam theej XY optical, lub tshuab hluav taws xob tsav amplifier thiab lub lens reflection optical. Lub teeb liab uas lub computer controller muab los tsav lub taub hau luam theej optical los ntawm lub voj voog tsav amplifier, yog li tswj qhov deflection ntawm lub teeb laser hauv XY dav hlau. Hais yooj yim, lub galvanometer yog lub tshuab luam theej galvanometer siv hauv kev lag luam laser. Nws cov lus tshaj lij hu ua high-speed scanning galvanometer Galvo scanning system. Lub galvanometer hu ua ammeter kuj tseem hu ua ammeter. Nws lub tswv yim tsim qauv ua raws li txoj kev tsim qauv ntawm ammeter. Lub lens hloov lub koob, thiab lub teeb liab ntawm lub probe hloov los ntawm lub computer tswj -5V-5V lossis -10V-+10V DC teeb liab. , kom ua tiav qhov kev nqis tes ua ua ntej. Ib yam li lub tshuab luam theej iav tig, lub tshuab tswj hwm no siv ob lub iav retracting. Qhov txawv yog tias lub cev muaj zog stepper uas tsav cov lens no hloov los ntawm lub cev muaj zog servo. Hauv lub kaw lus tswj hwm no, siv lub sensor txoj haujlwm. Lub tswv yim tsim thiab lub voj voog tsis zoo ntxiv kom ntseeg tau tias qhov tseeb ntawm lub kaw lus, thiab qhov ceev scanning thiab qhov tseeb ntawm tag nrho lub kaw lus mus txog qib tshiab. Lub taub hau cim galvanometer scanning feem ntau yog tsim los ntawm daim iav XY scanning, lub lens teb, galvanometer thiab software cim tswj hwm los ntawm lub khoos phis tawj. Xaiv cov khoom siv kho qhov muag sib xws raws li cov wavelengths laser sib txawv. Cov kev xaiv cuam tshuam kuj suav nrog cov laser beam expanders, lasers, thiab lwm yam. Hauv lub kaw lus qhia laser, lub waveform ntawm kev luam theej duab kho qhov muag yog vector scan, thiab qhov ceev scanning ntawm lub kaw lus txiav txim siab qhov ruaj khov ntawm cov qauv laser. Nyob rau hauv xyoo tas los no, cov scanners ceev ceev tau tsim, nrog rau kev luam theej duab ceev txog 45,000 cov ntsiab lus / thib ob, ua rau nws muaj peev xwm ua kom pom cov yeeb yaj kiab laser nyuaj.
5.1 Laser galvanometer vuam sib koom ua ke
5.1.1 Kev txhais thiab cov qauv ntawm galvanometer vuam sib koom ua ke:
Lub taub hau tsom xam siv lub tshuab ua lub platform txhawb nqa. Lub tshuab txav mus los thiab tawm kom ua tiav kev vuam ntawm ntau txoj kev sib txawv. Qhov tseeb ntawm kev vuam nyob ntawm qhov tseeb ntawm lub actuator, yog li muaj teeb meem xws li qhov tseeb qis, qeeb qeeb teb, thiab inertia loj. Lub tshuab luam theej galvanometer siv lub cev muaj zog los nqa lub lens rau deflection. Lub cev muaj zog yog tsav los ntawm qee qhov tam sim no thiab muaj qhov zoo ntawm qhov tseeb siab, me me inertia, thiab teb sai. Thaum lub teeb ci ntsa iab ntawm lub lens galvanometer, qhov deflection ntawm galvanometer hloov lub teeb laser. Yog li ntawd, lub teeb laser tuaj yeem luam theej txhua txoj kev hauv thaj chaw luam theej duab los ntawm lub tshuab galvanometer.
Cov khoom tseem ceeb ntawm lub tshuab galvanometer scanning system yog beam expansion collimator, focusing lens, XY ob-axis scanning galvanometer, control board thiab host computer software system. Lub scanning galvanometer feem ntau yog hais txog ob lub XY galvanometer scanning heads, uas tau tsav los ntawm high-speed reciprocating servo motors. Lub dual-axis servo system tsav lub XY dual-axis scanning galvanometer kom tig mus rau X-axis thiab Y-axis los ntawm kev xa cov lus txib mus rau X thiab Y-axis servo motors. Ua li no, los ntawm kev sib koom ua ke ntawm XY ob-axis iav lens, lub tshuab tswj hwm tuaj yeem hloov cov teeb liab los ntawm galvanometer board raws li cov duab kos ua ntej ntawm lub computer software raws li txoj kev teeb tsa, thiab txav mus sai sai ntawm lub workpiece plane los tsim ib txoj kev scanning.
5.1.2 Kev faib tawm ntawm cov pob qij txha vuam galvanometer:
1. Lub lens tsom mus rau pem hauv ntej
Raws li qhov kev sib raug zoo ntawm lub lens tsom thiab lub laser galvanometer, hom kev luam theej ntawm galvanometer tuaj yeem muab faib ua kev luam theej pem hauv ntej (Daim Duab 1 hauv qab no) thiab kev luam theej tom qab tsom (Daim Duab 2 hauv qab no). Vim muaj qhov sib txawv ntawm txoj kev pom thaum lub teeb laser tig mus rau ntau qhov chaw sib txawv (qhov deb ntawm lub teeb sib txawv), qhov chaw tsom laser thaum lub sijhawm luam theej hom kev tsom yav dhau los yog qhov chaw hemispherical, raws li pom hauv daim duab sab laug. Txoj kev luam theej tom qab tsom tau pom hauv daim duab sab xis. Lub lens lub hom phiaj yog lub lens F-plan. Daim iav F-plan muaj kev tsim kho qhov muag tshwj xeeb. Los ntawm kev qhia txog kev kho qhov muag, qhov chaw tsom hemispherical ntawm lub teeb laser tuaj yeem hloov kho kom tiaj tus. Kev luam theej tom qab tsom feem ntau yog qhov tsim nyog rau cov ntawv thov uas xav tau kev ua tiav siab thiab qhov ua tiav me me, xws li laser cim, laser microstructure vuam, thiab lwm yam.
2.Lub lens tsom mus rau tom qab
Thaum thaj chaw luam theej nce ntxiv, qhov aperture ntawm lub lens f-theta kuj nce ntxiv. Vim yog cov kev txwv ntawm kev siv tshuab thiab cov khoom siv, cov lens f-theta loj-aperture kim heev thiab qhov kev daws teeb meem no tsis raug lees txais. Lub lens pem hauv ntej galvanometer scanning system ua ke nrog rau lub tshuab hlau rau-axis yog qhov kev daws teeb meem uas ua tau zoo, uas tuaj yeem txo qhov kev vam khom rau cov khoom siv galvanometer, muaj qib siab ntawm qhov tseeb ntawm lub kaw lus, thiab muaj kev sib raug zoo. Qhov kev daws teeb meem no tau raug lees txais los ntawm feem ntau cov neeg sib koom ua ke. Txais yuav, feem ntau hu ua kev vuam dav hlau. Kev vuam ntawm module busbar, suav nrog kev ntxuav ncej, muaj cov ntawv thov dav hlau, uas tuaj yeem ua rau qhov dav ntawm kev ua haujlwm yooj yim thiab ua haujlwm tau zoo.
3.3D galvanometer:
Txawm hais tias nws yog kev luam theej pem hauv ntej lossis kev luam theej tom qab, qhov kev tsom mus rau ntawm lub teeb laser tsis tuaj yeem tswj tau rau kev tsom mus rau dynamic. Rau hom kev luam theej pem hauv ntej, thaum cov khoom ua haujlwm yuav tsum tau ua tiav me me, lub lens tsom mus rau muaj qee qhov tob focal, yog li nws tuaj yeem ua qhov kev luam theej tsom mus rau nrog hom me me. Txawm li cas los xij, thaum lub dav hlau yuav tsum tau luam theej loj, cov ntsiab lus ze ntawm periphery yuav tsis pom tseeb thiab tsis tuaj yeem tsom mus rau ntawm qhov chaw ntawm cov khoom ua haujlwm yuav tsum tau ua tiav vim nws dhau qhov tob ntawm qhov kev tsom mus rau laser. Yog li ntawd, thaum lub teeb laser yuav tsum tau tsom mus rau txhua qhov chaw ntawm lub dav hlau luam theej thiab thaj chaw pom loj, kev siv lub lens ntev focal ruaj khov tsis tuaj yeem ua tau raws li qhov yuav tsum tau luam theej. Lub kaw lus tsom mus rau dynamic yog ib pawg ntawm cov kab ke optical uas nws qhov ntev focal tuaj yeem hloov pauv raws li qhov xav tau. Yog li ntawd, cov kws tshawb fawb pom zoo siv lub lens tsom mus rau dynamic los them rau qhov sib txawv ntawm txoj kev optical, thiab siv lub lens concave (beam expander) los txav mus rau linearly raws li lub optical axis los tswj qhov chaw tsom mus rau thiab ua tiav Qhov chaw yuav tsum tau ua tiav dynamically them rau qhov sib txawv ntawm txoj kev optical ntawm ntau qhov chaw. Piv nrog rau 2D galvanometer, cov khoom sib xyaw ntawm 3D galvanometer feem ntau ntxiv "Z-axis optical system", yog li ntawd 3D galvanometer tuaj yeem hloov pauv qhov chaw tsom mus rau thaum lub sijhawm vuam thiab ua qhov chaw nkhaus ntawm qhov chaw vuam, tsis tas yuav hloov tus neeg nqa khoom xws li lub cuab yeej tshuab, thiab lwm yam zoo li 2D galvanometer. Qhov siab ntawm tus neeg hlau yog siv los kho qhov chaw tsom mus rau vuam.
Lub sijhawm tshaj tawm: Tsib Hlis-23-2024
