Kev siv tshuab ntxuav laseryog ib qho kev siv tshuab laser zoo hauv kev tsim kho vaj tse. Nws lub hauv paus ntsiab lus siv lub zog siab ntawm lasers los ua kom muaj kev sib cuam tshuam ntawm cov teeb laser thiab cov pa phem uas lo rau cov khoom ua haujlwm. Cov pa phem raug cais tawm ntawm cov khoom siv los ntawm kev nthuav dav thermal tam sim ntawd, yaj, roj volatilization thiab lwm yam txheej txheem. Muaj kev ua haujlwm zoo, kev phooj ywg ib puag ncig thiab kev txuag hluav taws xob, cov tshuab ntxuav laser tau siv tau zoo hauv kev ntxuav pwm log tsheb, tshem tawm cov xim ntawm lub cev dav hlau, kho cov khoom qub txeeg qub teg thiab lwm yam teb.
Cov txheej txheem ntxuav ib txwm muaj xws li kev ntxuav kev sib txhuam (xuab zeb blasting, kev ntxuav dej siab siab, thiab lwm yam), kev ntxuav xeb tshuaj, kev ntxuav ultrasonic, kev ntxuav dej khov qhuav thiab ntau ntxiv. Cov txheej txheem no siv dav hauv kev lag luam. Piv txwv li, xuab zeb blasting tuaj yeem tshem tawm cov xeb hlau, cov burrs saum npoo thiab cov txheej txheem conformal ntawm cov laug cam circuit los ntawm kev xaiv cov khoom siv abrasives ntawm ntau yam hardness. Kev ntxuav xeb tshuaj yog dav siv rau kev tshem tawm cov roj ntawm cov khoom siv, kev ntxuav boiler thiab kev qhib cov kav dej roj. Txawm hais tias laus lawm, cov txheej txheem ib txwm muaj qhov tsis zoo: xuab zeb blasting yooj yim ua rau puas tsuaj rau cov chaw kho, thiab kev ntxuav xeb tshuaj ua rau muaj kuab paug rau ib puag ncig thiab yuav ua rau cov substrates xeb yog tias ua haujlwm tsis raug. Kev tshwm sim ntawm kev ntxuav laser cim ib qho kev hloov pauv hauv kev siv tshuab ntxuav. Siv cov lasers 'lub zog ceev, kev raug thiab kev sib kis zoo, kev ntxuav laser ua tau zoo dua cov txheej txheem ib txwm muaj hauv kev ntxuav zoo, kev raug thiab kev tso chaw. Nws tshem tawm cov kuab paug ib puag ncig los ntawm kev ntxuav tshuaj thiab tsis ua rau cov substrates puas tsuaj.
Cov Ntsiab Cai ntawm Kev Ntxuav Laser
Kev ntxuav laser yog dab tsi tiag? Nws yog hais txog cov txheej txheem ntawm kev tshem tawm cov khoom siv los ntawm cov khoom khov (lossis qee zaum kua) ntawm cov nplaim laser irradiation. Thaum lub zog laser qis, lub zog laser nqus tau ua rau cov khoom kub, ua rau evaporation lossis sublimation. Thaum lub zog laser siab, cov khoom siv feem ntau hloov mus ua plasma. Kev ntxuav laser feem ntau siv cov lasers pulsed rau kev tshem tawm cov khoom siv, txawm hais tias cov teeb laser txuas ntxiv mus tuaj yeem tshem cov khoom siv ntawm qhov muaj zog txaus. Cov lasers ultraviolet excimer tob, nrog cov wavelengths nyob ib puag ncig 200 nm, feem ntau yog siv rau photoablation.
Qhov tob ntawmlub zog laserQhov kev nqus thiab qhov ntau ntawm cov khoom raug tshem tawm ib lub pulse nyob ntawm seb cov khoom siv kho qhov muag ntawm cov khoom siv, nrog rau laser wavelength thiab lub sijhawm pulse. Tag nrho cov pawg ablated los ntawm lub hom phiaj ib lub pulse yog txhais tias yog ablation rate. Cov yam ntxwv ntawm laser radiation xws li scanning speed thiab kab kev npog cuam tshuam rau cov txheej txheem ablation.
Hom Kev Siv Tshuab Ntxuav Laser
1) Kev Ntxuav Qhuav Laser
Kev ntxuav qhuav laser muaj xws likev siv laser pulsed irradiation ncaj qha rau cov khoom ua haujlwm. Cov pa phem lossis cov substrates nqus tau lub zog laser, ua rau lawv qhov kub nce siab thiab ua rau muaj kev nthuav dav thermal lossis substrate thermal vibration, uas cais cov pa phem ntawm cov substrates. Nws tshwm sim hauv ob qho xwm txheej: cov pa phem ntawm qhov chaw nqus tau lub zog laser thiab nthuav dav, lossis cov substrates nqus tau lub zog thiab co thermally.
Xyoo 1969, SM Bedair et al. pom tias kev kho mob saum npoo av ib txwm muaj (kev kho cua sov, kev xeb tshuaj lom neeg, kev xuab zeb) txhua yam muaj kev txwv. Lawv tau pom tias lub zog ceev ntawm cov lasers tsom mus rau qhov chaw tuaj yeem ua rau cov khoom siv saum npoo av tsis ua rau cov substrates puas tsuaj. Kev sim tau lees paub tias Q-switched ruby laser nrog lub zog ceev ntawm 30 MW / cm² tuaj yeem ntxuav cov pa phem ntawm cov nplaim silicon yam tsis muaj kev puas tsuaj rau cov substrate, cim thawj zaug kev siv laser qhuav ntxuav.
Tus nqi ntxuav tag nrho tuaj yeem qhia los ntawm kev tshem tawm cov khib nyiab zaj duab xis, raws li qhia hauv qab no:
(Cov mis: ε—laser pulse zog index; h—cov zaj duab xis tuab index; E—zaj duab xis elastic modulus index)
2) Kev Ntxuav Dej Laser
Ua ntej siv laser pulsed irradiation, ib daim zaj duab xis kua tau raug txheej ua ntej rau ntawm qhov chaw ua haujlwm. Lub zog laser ua rau daim zaj duab xis sov sai thiab ua pa, tsim kom muaj kev co tam sim ntawd uas tshem tawm cov khoom tsis huv ntawm lub substrate. Txoj kev no tsis tas yuav muaj kev sib xyaw tshuaj ntawm lub substrate thiab daim zaj duab xis kua, ua rau nws cov ntaub ntawv siv tau tsawg.
Xyoo 1991, K. Imen et al. tau hais txog cov khoom seem submicron uas nyob ntawm cov wafers semiconductor thiab cov hlau tom qab kev ntxuav ib txwm muaj. Lawv tau txheej cov substrates nrog cov zaj duab xis uas nqus tau laser thiab irradiated nws nrog CO₂ laser. Cov zaj duab xis nqus lub zog, cua sov sai, rhaub thiab dhau los ua pa tawg, tshem tawm cov khoom seem ntawm qhov chaw - qhov no txhais tau tias kev ntxuav ntub dej laser.
3) Kev Ntxuav Tes Los Ntawm Laser Plasma Shockwave
Cov teeb meem laser plasma shockwaves tsim thaum cov lasers ionize huab cua mus rau hauv cov teeb meem plasma spherical thaum lub sijhawm irradiation. Cov teeb meem no ntaus cov substrates, tso tawm lub zog los tshem tawm cov pa phem yam tsis ua rau lub substrate puas tsuaj (lasers tsis cuam tshuam ncaj qha nrog cov substrates). Cov thev naus laus zis no ntxuav cov khoom me me li kaum tawm nanometers thiab tsis muaj kev txwv rau qhov ntev ntawm laser.
Cov ntsiab cai ntawm kev ntxuav plasma tau muab sau ua ke raws li hauv qab no:
a) Cov teeb laser raug nqus los ntawm cov txheej txheem ua qias tuaj ntawm qhov chaw tsom.
b) Kev nqus zog siab ua rau cov plasma nthuav dav sai (cov roj ionized tsis ruaj khov heev), tsim cov shockwaves.
c) Shockwaves tawg ua tej daim me me thiab tshem tawm cov kuab paug.
d) Cov pulses laser yuav tsum luv txaus kom tsis txhob muaj cua sov sib sau ua ke uas ua rau lub substrate puas tsuaj.
e) Cov kev sim qhia cov qauv plasma ntawm cov hlau thaum muaj oxides.
Kev tsim cov plasma tsuas yog tshwm sim saum toj ntawm qhov ntsuas zog ceev, uas nyob ntawm seb cov kuab paug lossis txheej oxide yuav tsum tau tshem tawm. Muaj qhov ntsuas thib ob siab dua, dhau ntawm qhov uas lub substrate raug puas tsuaj. Txhawm rau kom ntseeg tau tias kev ntxuav zoo yam tsis muaj kev puas tsuaj rau lub substrate, cov kev teeb tsa laser yuav tsum tau kho kom tswj tau qhov ceev zog ntawm ob qho ntsuas.
Xyoo 2001, JM Lee et al. siv cov plasma shockwaves los ntawm cov lasers uas muaj zog heev. Lub laser pulsed nrog lub zog ceev ntawm 2.0 J/cm² (ntau tshaj qhov silicon qhov kev puas tsuaj threshold) irradiated silicon wafers parallelly, ua tiav tshem tawm 1 μm tungsten particles. Hais lus nruj me ntsis, laser plasma shockwave cleaning yog ib feem ntawm kev ntxuav qhuav.
Chiv thawj tsim los tshem tawm cov khoom me me ntawm cov semiconductor wafers, peb lub tshuab laser ntxuav no tau nthuav dav mus rau kev ntxuav pwm log tsheb, tshem tawm cov xim pleev rau ntawm daim tawv nqaij dav hlau, kho cov khoom qub txeeg qub teg thiab ntau ntxiv. Cov pa roj inert tuaj yeem raug tshuab rau ntawm cov substrates thaum lub sijhawm laser irradiation kom tshem tawm cov khoom tsis huv tam sim ntawd, tiv thaiv kev rov ua dua thiab oxidation.
Cov ntawv thov ntawm Laser Cleaning Technology
1) Kev Lag Luam Semiconductor: Kev Ntxuav Cov Wafers Semiconductor thiab Cov Khoom Siv Optical
Cov semiconductor wafers thiab optical substrates ua cov kauj ruam ua tiav zoo ib yam (txiav, sib tsoo) los ua cov duab xav tau, ua rau muaj cov khoom me me uas nyuaj rau tshem tawm thiab yooj yim rov ua dua. Cov khoom qias neeg ntawm cov wafers ua rau qhov zoo ntawm kev luam ntawv hauv Circuit Court tsis zoo thiab ua rau lub neej ntawm cov chip luv dua. Ntawm cov optical substrates, lawv ua rau cov khoom siv optical thiab kev ua haujlwm ntawm txheej tsis zoo, ua rau muaj kev faib hluav taws xob tsis sib xws thiab txo lub neej kev pabcuam.
Kev ntxuav qhuav laser tsis tshua siv ntawm no vim muaj kev pheej hmoo ntawm kev puas tsuaj rau cov khoom siv, thaum kev ntxuav ntub thiab kev ntxuav plasma shockwave muaj ntau daim ntawv thov ua tiav. Xu Chuanyi et al. tau tso cov xim sib nqus micron-scale ua zaj duab xis dielectric rau ntawm cov khoom siv optical ultra-smooth, ua tiav kev ntxuav laser pulsed zoo. Txawm hais tias tag nrho cov khoom tsis huv nce ntxiv, lawv qhov loj me thiab kev npog txo qis heev. Zhang Ping kawm txog cov teebmeem ntawm qhov deb ua haujlwm thiab lub zog laser ntawm kev ntxuav kom zoo rau cov khoom me me ntawm ntau qhov ntau thiab tsawg. Cov kev sim tau qhia tias 240 mJ laser tau ua tiav kev ntxuav zoo tshaj plaws ntawm cov khoom polystyrene ntawm cov iav conductive ntawm 1.90 hli ua haujlwm deb. Kev ntxuav kom zoo dua nrog lub zog laser siab dua, thiab cov khoom loj dua yooj yim dua rau kev tshem tawm.
2) Kev Lag Luam Hlau: Kev Ntxuav Qhov Chaw Hlau
Kev ntxuav cov hlau nto tsom mus rau cov khoom tsis huv loj heev: cov txheej oxide/xeb, xim, txheej txheej thiab lwm yam khoom siv, uas yog cov organic (xim, txheej txheej) lossis cov khoom tsis huv inorganic (xeb). Kev ntxuav ua tau raws li cov kev cai ua tiav/siv tom qab: piv txwv li, tshem tawm cov txheej oxide tuab 10 μm ntawm cov titanium alloys ua ntej vuam, tshem cov xim ntawm cov tawv nqaij dav hlau rau kev pleev xim dua, thiab ntxuav cov roj hmab seem ntawm cov pwm log tsheb kom ntseeg tau tias cov khoom zoo thiab lub neej pwm.
Cov hlau muaj qhov ua rau puas tsuaj ntau dua li lawv cov qhov ua rau cov pa phem, ua rau kev ntxuav zoo nrog cov lasers uas siv zog zoo. Cov ntawv thov laus suav nrog: Wang Lihua et al. tau qhia tias 5.1 J/cm² laser tshem tawm cov txheej oxide ntawm A5083-111H txhuas alloy thaum khaws cia qhov zoo ntawm cov substrate, thiab 100 W pulsed laser tau ntxuav cov txheej titanium alloy oxide thiab ua kom qhov nyuaj ntawm qhov chaw. Cov chaw tsim khoom hauv tsev (Raycus Laser, Han's Laser, Shenzhen Chuangxin) muab cov khoom siv ntxuav laser rau cov pwm roj hmab, xeb hlau thiab tshem tawm cov roj ib feem.
3) Kev Tiv Thaiv Cov Khoom Qub Txog Kab Lis Kev Cai: Kev Ntxuav Cov Khoom Qub Txog Kab Lis Kev Cai thiab Cov Ntawv Sau
Cov khoom qub txeeg qub teg uas ua los ntawm hlau thiab pob zeb muaj av qias neeg, cov xim kua mem thiab lwm yam tsis huv nyob rau lub sijhawm ntev, uas yuav tsum tau muab tshem tawm kom rov qab zoo li qub. Cov khoom qub uas ua los ntawm ntawv (duab kos, ntawv sau ntawv) yuav tsim pwm thiab cov phaj thaum khaws cia tsis raug, ua rau lawv cov xwm txheej thiab tus nqi ntawm kab lis kev cai/keeb kwm puas tsuaj loj heev.
Zhao Ying thiab lwm tus tau txheeb xyuas qhov kev siv UV laser ntxuav cov pwm ntawm cov ntawv mov: ib qho scan ntawm 3.2 J/mm² tshem tawm cov plaques nyias, thaum ob qho scans tau tshem tawm tag nrho; lub zog laser ntau dhau ua rau daim ntawv puas tsuaj. Zhang Xiaotong tau kho dua ib qho khoom siv tooj dag kub siv txoj kev laser ntub. Zhang Licheng tau siv laser ntxuav rau ib daim duab puab poj niam pleev xim los ntawm Han Dynasty. Yuan Xiaodong thiab lwm tus tau soj ntsuam qhov ua tau zoo ntawm laser ntxuav rau cov pob zeb relics, piv rau qhov puas tsuaj ntawm cov substrate thiab kev tshem tawm zoo rau cov kua mem, pa luam yeeb thiab xim pleev xim rau ntawm cov xuab zeb.
Xaus lus
Kev ntxuav laser yog ib qho thev naus laus zis siab heev uas muaj kev tshawb fawb dav dav thiab kev cia siab rau kev siv hauv aerospace, cov khoom siv tub rog, cov khoom siv hluav taws xob thiab lwm yam kev ua haujlwm siab. Loj hlob hauv ntau yam lag luam vim nws qhov ua tau zoo, kev phooj ywg ib puag ncig thiab cov txiaj ntsig zoo tshaj plaws ntawm kev ntxuav, nws cov ntawv thov txuas ntxiv nthuav dav. Dhau li ntawm cov xim thiab kev tshem tawm xeb uas tau tsim, cov kev nce qib tsis ntev los no suav nrog kev ntxuav laser ntawm cov txheej oxide ntawm cov xov hlau. Kev txhim kho yav tom ntej nyob ntawm kev nthuav dav cov ntawv thov uas twb muaj lawm, nkag mus rau hauv cov teb tshiab thiab kev tsim kho tshiab cov khoom siv:
- Txhawb kev tshawb fawb txog kev xav kom coj tau kev siv tau tiag tiag. Kev tshawb fawb tam sim no vam khom rau kev sim ntau yam, tsis muaj lub moj khaum kev xav uas paub tab. Kev tsim kom muaj lub moj khaum zoo li no yog qhov tseem ceeb rau kev paub tab ntawm thev naus laus zis.
- Nthuav dav cov kev siv rau hauv cov teb uas twb muaj lawm thiab cov teb tshiab. Siv rau kev tshem tawm xim/xeb, kev siv tshiab suav nrog kev ntxuav cov hlau oxide, muab av zoo rau kev loj hlob.
- Tsim cov khoom siv ntxuav laser tshiab, faib ua ntau yam khoom siv thoob ntiaj teb (piv txwv li, kev sib xyaw ua ke ntawm cov xim / xeb tshem tawm) thiab cov cuab yeej tshwj xeeb (piv txwv li, cov khoom siv kho kom haum / fibers rau qhov chaw kaw). Kev siv tshuab tag nrho los ntawm kev koom ua ke nrog cov neeg hlau lag luam yog ib qho kev taw qhia zoo.
Lub sijhawm tshaj tawm: Tsib Hlis-14-2026
