Txawm hais tias ultrafast lasers tau muaj nyob rau ntau xyoo lawm, cov ntawv thov kev lag luam tau loj hlob sai heev hauv ob xyoo caum dhau los. Xyoo 2019, tus nqi lag luam ntawm ultrafastcov khoom siv laserkev ua tiav yog kwv yees li US $ 460 lab, nrog rau kev loj hlob txhua xyoo ntawm 13%. Cov chaw siv uas cov lasers ultrafast tau siv tau zoo los ua cov ntaub ntawv lag luam suav nrog kev tsim thiab kho cov duab thaij duab hauv kev lag luam semiconductor nrog rau kev txiav silicon, kev txiav iav / kev sau ntawv thiab (indium tin oxide) ITO zaj duab xis tshem tawm hauv cov khoom siv hluav taws xob xws li xov tooj ntawm tes thiab ntsiav tshuaj, piston texturing rau kev lag luam tsheb, kev tsim cov stent coronary thiab kev tsim cov khoom siv microfluidic rau kev lag luam kho mob.
01 Kev tsim khoom thiab kho cov duab thaij hauv kev lag luam semiconductor
Cov lasers ultrafast tau siv rau hauv ib qho ntawm cov ntawv thov kev lag luam thaum ntxov tshaj plaws hauv kev ua cov ntaub ntawv. IBM tau tshaj tawm txog kev siv femtosecond laser ablation hauv kev tsim cov duab thaij duab hauv xyoo 1990. Piv nrog nanosecond laser ablation, uas tuaj yeem tsim cov hlau tawg thiab kev puas tsuaj rau iav, cov ntsej muag laser femtosecond tsis qhia cov hlau tawg, tsis muaj kev puas tsuaj rau iav, thiab lwm yam. Qhov zoo. Txoj kev no yog siv los tsim cov voj voog sib xyaw (ICs). Kev tsim cov IC chip yuav xav tau txog 30 lub ntsej muag thiab raug nqi > $ 100,000. Kev ua cov laser femtosecond tuaj yeem ua cov kab thiab cov ntsiab lus hauv qab 150nm.
Daim Duab 1. Kev tsim thiab kho cov ntaub thaiv qhov muag
Daim Duab 2. Cov txiaj ntsig zoo tshaj plaws ntawm cov qauv npog ntsej muag sib txawv rau kev siv tshuab ultraviolet loj heev
02 Kev txiav silicon hauv kev lag luam semiconductor
Kev txiav silicon wafer yog ib qho txheej txheem tsim khoom txheem hauv kev lag luam semiconductor thiab feem ntau yog ua los ntawm kev siv tshuab txiav. Cov log txiav no feem ntau tsim cov kab nrib pleb me me thiab nyuaj rau txiav cov wafers nyias (piv txwv li tuab < 150 μm). Kev txiav laser ntawm silicon wafers tau siv hauv kev lag luam semiconductor tau ntau xyoo, tshwj xeeb tshaj yog rau cov wafers nyias (100-200μm), thiab tau ua tiav ntau kauj ruam: laser grooving, ua raws li kev sib cais tshuab lossis stealth txiav (piv txwv li infrared laser beam hauv silicon scribing) ua raws li kev sib cais kab xev tshuab. Lub nanosecond pulse laser tuaj yeem ua tiav 15 wafers ib teev, thiab lub picosecond laser tuaj yeem ua tiav 23 wafers ib teev, nrog rau qhov zoo dua.
03 Kev txiav iav/sau ntawv hauv kev lag luam khoom siv hluav taws xob
Cov ntxaij vab tshaus kov thiab cov tsom iav tiv thaiv rau cov xov tooj ntawm tes thiab cov laptops tab tom nyias zuj zus thiab qee cov duab geometric yog nkhaus. Qhov no ua rau kev txiav tshuab ib txwm nyuaj dua. Cov lasers ib txwm muaj feem tsim cov khoom txiav tsis zoo, tshwj xeeb tshaj yog thaum cov iav no tau teeb tsa 3-4 txheej thiab cov iav tiv thaiv sab saum toj 700 μm tuab yog tempered, uas tuaj yeem tawg nrog kev ntxhov siab hauv zos. Cov lasers Ultrafast tau pom tias muaj peev xwm txiav cov iav no nrog lub zog ntug zoo dua. Rau kev txiav vaj huam sib luag loj, lub laser femtosecond tuaj yeem tsom mus rau sab nraub qaum ntawm daim iav, khawb sab hauv ntawm lub iav yam tsis ua rau lub ntsej muag pem hauv ntej puas tsuaj. Lub iav tuaj yeem tawg siv cov txheej txheem kho tshuab lossis thermal raws li tus qauv qhab nia.
Daim Duab 3. Picosecond ultrafast laser iav txiav cov duab tshwj xeeb
04 Cov qauv Piston hauv kev lag luam tsheb
Cov cav tsheb sib dua yog ua los ntawm cov hlau txhuas, uas tsis tiv taus kev hnav zoo li hlau cam khwb cia. Cov kev tshawb fawb tau pom tias kev ua cov qauv ntawm lub piston ntawm lub tsheb siv femtosecond laser tuaj yeem txo qhov kev sib txhuam txog li 25% vim tias cov khib nyiab thiab roj tuaj yeem khaws cia tau zoo.
Daim Duab 4. Kev siv laser Femtosecond los ua cov pistons ntawm lub cav tsheb kom txhim kho kev ua haujlwm ntawm lub cav
05 Kev tsim cov stent hauv plawv hauv kev lag luam kho mob
Muaj ntau lab lub coronary stents raug cog rau hauv lub cev cov hlab ntsha coronary kom qhib ib txoj hauv kev rau cov ntshav ntws mus rau hauv cov hlab ntsha uas raug txhaws, cawm tau ntau lab tus neeg txoj sia txhua xyoo. Coronary stents feem ntau yog ua los ntawm cov hlau (piv txwv li, stainless hlau, nickel-titanium shape memory alloy, lossis tsis ntev los no cobalt-chromium alloy) hlau mesh nrog qhov dav ntawm kwv yees li 100 μm. Piv rau kev txiav laser ntev-pulse, qhov zoo ntawm kev siv ultrafast lasers los txiav brackets yog qhov zoo ntawm kev txiav, qhov tiav zoo dua, thiab tsawg dua cov khib nyiab, uas txo cov nqi tom qab ua tiav.
06 Kev tsim khoom siv Microfluidic rau kev lag luam kho mob
Cov khoom siv microfluidic feem ntau siv hauv kev lag luam kho mob rau kev kuaj mob thiab kuaj mob. Cov no feem ntau yog tsim los ntawm kev txhaj tshuaj me me ntawm cov khoom ib leeg thiab tom qab ntawd sib txuas siv cov kua nplaum lossis vuam. Kev tsim cov khoom siv microfluidic laser ceev ceev muaj qhov zoo ntawm kev tsim cov 3D microchannels hauv cov ntaub ntawv pob tshab xws li iav yam tsis tas yuav muaj kev sib txuas. Ib txoj kev yog kev tsim cov laser ceev ceev hauv cov iav loj ua raws li kev siv tshuaj ntub dej, thiab lwm txoj hauv kev yog femtosecond laser ablation hauv cov iav lossis yas hauv dej distilled kom tshem tawm cov khib nyiab. Lwm txoj hauv kev yog tshuab cov channels rau hauv qhov chaw iav thiab kaw lawv nrog lub hau iav ntawm femtosecond laser vuam.
Daim Duab 6. Kev siv Femtosecond laser los ua kom cov khoom siv xaiv tau los npaj cov channel microfluidic hauv cov khoom siv iav
07 Kev khawb me me ntawm lub nozzle injector
Kev siv Femtosecond laser microhole machining tau hloov micro-EDM ntawm ntau lub tuam txhab hauv kev lag luam injector siab vim muaj kev ywj pheej ntau dua hauv kev hloov cov qauv qhov ntws thiab lub sijhawm ua haujlwm luv dua. Lub peev xwm los tswj qhov chaw tsom mus rau thiab qhov nkhaus ntawm lub beam los ntawm lub taub hau scan ua ntej tau ua rau muaj kev tsim cov qauv qhov (piv txwv li, barrel, flare, convergence, divergence) uas tuaj yeem txhawb kev ua kom atomization lossis nkag mus rau hauv chav combustion. Lub sijhawm drilling nyob ntawm qhov ntim ablation, nrog rau qhov tuab ntawm 0.2 - 0.5 hli thiab qhov txoj kab uas hla ntawm 0.12 - 0.25 hli, ua rau cov txheej txheem no kaum npaug sai dua li micro-EDM. Microdrilling yog ua tiav hauv peb theem, suav nrog kev ntxhib thiab kev ua tiav ntawm cov qhov los ntawm-pilot. Argon yog siv ua roj pabcuam los tiv thaiv lub qhov dej los ntawm oxidation thiab los tiv thaiv cov plasma kawg thaum lub sijhawm pib.
Daim Duab 7. Kev ua haujlwm siab ntawm Femtosecond laser ntawm qhov inverted taper rau lub cav diesel injector
08 Kev siv laser ua kom sai heev
Nyob rau xyoo tas los no, txhawm rau txhim kho qhov tseeb ntawm kev ua haujlwm, txo cov khoom puas tsuaj, thiab ua kom cov txheej txheem ua haujlwm zoo dua, thaj chaw ntawm micromachining tau maj mam dhau los ua qhov chaw tsom mus rau cov kws tshawb fawb. Ultrafast laser muaj ntau yam zoo ntawm kev ua haujlwm xws li kev puas tsuaj tsawg thiab qhov tseeb siab, uas tau dhau los ua qhov chaw tsom mus rau kev txhawb nqa kev txhim kho cov txheej txheem ua haujlwm. Tib lub sijhawm, ultrafast lasers tuaj yeem ua haujlwm rau ntau yam khoom siv, thiab laser ua cov khoom puas tsuaj kuj yog qhov kev tshawb fawb tseem ceeb. Ultrafast laser siv los ablate cov ntaub ntawv. Thaum lub zog ceev ntawm lub laser siab dua qhov ablation threshold ntawm cov khoom siv, qhov chaw ntawm cov khoom siv ablated yuav qhia cov qauv micro-nano nrog qee yam ntxwv. Kev tshawb fawb qhia tau hais tias qhov tshwj xeeb nto qauv no yog ib qho tshwm sim uas tshwm sim thaum laser ua cov ntaub ntawv. Kev npaj ntawm cov qauv micro-nano nto tuaj yeem txhim kho cov khoom ntawm cov khoom siv nws tus kheej thiab tseem ua rau kev txhim kho cov ntaub ntawv tshiab. Qhov no ua rau kev npaj ntawm cov qauv micro-nano nto los ntawm ultrafast laser yog ib txoj kev siv tshuab nrog qhov tseem ceeb ntawm kev txhim kho. Tam sim no, rau cov ntaub ntawv hlau, kev tshawb fawb txog kev ua kom cov nplaim laser ceev ceev tuaj yeem txhim kho cov khoom ntub dej ntawm cov hlau, txhim kho kev sib txhuam ntawm qhov chaw thiab cov khoom hnav, txhim kho kev nplaum txheej, thiab kev nthuav dav thiab kev nplaum ntawm cov hlwb.
Daim Duab 8. Cov khoom siv superhydrophobic ntawm qhov chaw silicon uas tau npaj los ntawm laser
Ua ib lub tshuab ua tiav tshiab, kev ua laser ceev ceev muaj cov yam ntxwv ntawm thaj chaw me me uas raug cua sov, cov txheej txheem tsis yog kab ntawm kev sib cuam tshuam nrog cov ntaub ntawv, thiab kev ua tiav siab dhau qhov kev txwv diffraction. Nws tuaj yeem paub txog kev ua tiav zoo thiab siab-precision micro-nano ntawm ntau yam ntaub ntawv. thiab peb-seem micro-nano qauv fabrication. Kev ua tiav laser tsim ntawm cov ntaub ntawv tshwj xeeb, cov qauv nyuaj thiab cov khoom siv tshwj xeeb qhib txoj hauv kev tshiab rau micro-nano tsim. Tam sim no, femtosecond laser tau siv dav hauv ntau qhov kev tshawb fawb tshiab: femtosecond laser tuaj yeem siv los npaj ntau yam khoom siv kho qhov muag, xws li microlens arrays, bionic compound qhov muag, optical waveguides thiab metasurfaces; siv nws qhov kev ua tiav siab, kev daws teeb meem siab thiab Nrog peb-seem ua tiav peev xwm, femtosecond laser tuaj yeem npaj lossis koom ua ke microfluidic thiab optofluidic chips xws li microheater Cheebtsam thiab peb-seem microfluidic channels; ntxiv rau, femtosecond laser kuj tseem tuaj yeem npaj ntau hom micro-nanostructures ntawm qhov chaw kom ua tiav kev tiv thaiv kev cuam tshuam, tiv thaiv kev cuam tshuam, super-hydrophobic, tiv thaiv icing thiab lwm yam haujlwm; tsis yog li ntawd xwb, femtosecond laser kuj tau siv rau hauv thaj chaw ntawm biomedicine, qhia txog kev ua tau zoo hauv cov teb xws li biological micro-stents, cell culture substrates thiab biological microscopic imaging. Kev cia siab dav dav. Tam sim no, cov teb thov ntawm femtosecond laser processing tab tom nthuav dav txhua xyoo. Ntxiv rau cov micro-optics, microfluidics, ntau yam micro-nanostructures thiab biomedical engineering applications, nws kuj ua lub luag haujlwm loj hauv qee qhov chaw tshiab, xws li metasurface preparation., micro-nano manufacturing thiab ntau-dimensional optical information storage, thiab lwm yam.
Lub sijhawm tshaj tawm: Plaub Hlis-17-2024
