Txawm hais tias ultrafast lasers tau nyob ib ncig ntawm ntau xyoo lawm, cov ntawv thov kev lag luam tau loj hlob sai hauv ob xyoo dhau los. Hauv 2019, kev lag luam tus nqi ntawm ultrafastcov khoom siv laserKev ua tiav yog kwv yees li US $ 460 lab, nrog rau kev loj hlob txhua xyoo ntawm 13%. Daim ntawv thov thaj chaw uas ultrafast lasers tau ntse siv los ua cov ntaub ntawv muaj xws li photomask fabrication thiab kho nyob rau hauv lub semiconductor kev lag luam nrog rau silicon dicing, iav txiav / scribing thiab (indium tin oxide) ITO zaj duab xis tshem tawm hauv cov neeg siv khoom siv hluav taws xob xws li xov tooj ntawm tes thiab ntsiav tshuaj. , piston texturing rau kev lag luam automotive, coronary stent manufacturing thiab microfluidic device manufacturing rau kev kho mob kev lag luam.
01 Photomask tsim thiab kho hauv kev lag luam semiconductor
Ultrafast lasers tau siv nyob rau hauv ib qho ntawm cov kev lag luam ntxov tshaj plaws hauv kev ua cov ntaub ntawv. IBM tau tshaj tawm txog kev siv femtosecond laser ablation hauv photomask ntau lawm hauv 1990s. Piv nrog nanosecond laser ablation, uas tuaj yeem tsim cov hlau tawg thiab iav puas, femtosecond laser qhov ncauj qhov ntswg qhia tsis muaj hlau spatter, tsis muaj iav puas, thiab lwm yam. Qhov zoo. Txoj kev no yog siv los tsim kev sib koom ua ke (ICs). Kev tsim cov IC nti yuav xav tau txog li 30 lub qhov ncauj qhov ntswg thiab tus nqi> $ 100,000. Femtosecond laser processing tuaj yeem ua cov kab thiab cov ntsiab lus hauv qab 150nm.
Daim duab 1. Photomask fabrication thiab kho
Daim duab 2. Kev ua kom zoo tshaj plaws ntawm cov qauv npog ntsej muag sib txawv rau huab cua ultraviolet lithography
02 Silicon txiav hauv kev lag luam semiconductor
Silicon wafer dicing yog txheej txheem tsim khoom hauv kev lag luam semiconductor thiab feem ntau yog ua los ntawm kev siv tshuab dicing. Cov log no feem ntau tsim microcracks thiab nyuaj rau txiav nyias (xws li thickness <150 μm) wafers. Laser txiav ntawm silicon wafers tau siv nyob rau hauv lub semiconductor kev lag luam tau ntau xyoo, tshwj xeeb tshaj yog rau nyias wafers (100-200μm), thiab yog nqa tawm nyob rau hauv ntau cov kauj ruam: laser grooving, raws li los ntawm mechanical sib cais los yog stealth txiav (xws li infrared laser beam sab hauv. cov silicon scribing) ua raws li cov khoom siv sib cais. Lub nanosecond mem tes laser tuaj yeem ua tiav 15 wafers ib teev, thiab picosecond laser tuaj yeem ua 23 wafers ib teev, nrog zoo dua.
03 iav txiav / scribing nyob rau hauv lub consumable electronics kev lag luam
Kov cov ntxaij vab tshaus thiab tsom iav tiv thaiv rau cov xov tooj ntawm tes thiab laptops tau txais thinner thiab qee cov duab geometric yog nkhaus. Qhov no ua rau tsoos mechanical txiav nyuaj dua. Cov lasers feem ntau tsim cov kev txiav tsis zoo, tshwj xeeb tshaj yog thaum cov iav tsom iav tau teeb tsa 3-4 txheej thiab sab saum toj 700 μm tuab tiv thaiv iav yog tempered, uas tuaj yeem tawg nrog kev ntxhov siab hauv zos. Ultrafast lasers tau pom tias tuaj yeem txiav cov iav no nrog lub zog zoo dua. Rau cov vaj huam sib luag loj loj txiav, femtosecond laser tuaj yeem tsom mus rau sab nraub qaum ntawm daim iav, khawb sab hauv ntawm iav yam tsis muaj kev puas tsuaj rau pem hauv ntej nto. Cov iav tuaj yeem tawg tau siv cov cuab yeej siv tshuab lossis thermal txhais tau raws li tus qauv qhab nia.
Daim duab 3. Picosecond ultrafast laser iav tshwj xeeb zoo li txiav
04 Piston textures hauv kev lag luam tsheb
Lub teeb lub tsheb cav yog ua los ntawm aluminium alloys, uas tsis yog hnav-resistant li cam khwb cia hlau. Cov kev tshawb fawb tau pom tias femtosecond laser ua ntawm lub tsheb piston textures tuaj yeem txo kev sib txhuam txog li 25% vim tias cov khib nyiab thiab roj tuaj yeem khaws cia zoo.
Daim duab 4. Femtosecond laser processing ntawm lub tsheb cav pistons los txhim kho cav kev ua tau zoo
05 Coronary stent manufacturing hauv kev kho mob kev lag luam
Ntau lab tus kab mob coronary stents tau cog rau hauv lub cev cov hlab ntsha hauv lub cev kom qhib cov hlab ntsha kom cov ntshav ntws mus rau lwm cov hlab ntsha, cawm ntau lab tus tib neeg txhua xyoo. Coronary stents feem ntau yog tsim los ntawm cov hlau (xws li, stainless hlau, npib tsib xee-titanium zoo nco alloy, los yog tsis ntev los no cobalt-chromium alloy) hlau mesh nrog ib tug strut dav ntawm kwv yees li 100 μm. Piv nrog rau ntev-mem tes laser txiav, qhov zoo ntawm kev siv ultrafast lasers txiav brackets yog cov txiav zoo, zoo dua nto tiav, thiab cov khib nyiab tsawg, uas txo cov nqi tom qab ua tiav.
06 Microfluidic khoom tsim rau kev lag luam kho mob
Cov khoom siv microfluidic feem ntau yog siv hauv kev lag luam kho mob rau kev kuaj kab mob thiab kuaj mob. Cov no feem ntau yog tsim los ntawm micro-txhaj tshuaj molding ntawm ib tus neeg qhov chaw thiab tom qab ntawd txuas nrog siv gluing lossis vuam. Ultrafast laser fabrication ntawm cov khoom siv microfluidic muaj qhov zoo ntawm kev tsim 3D microchannels hauv cov ntaub ntawv pob tshab xws li iav tsis tas yuav tsum muaj kev sib txuas. Ib txoj hauv kev yog ultrafast laser fabrication nyob rau hauv ib lub khob iav ua raws li cov tshuaj ntub dej etching, thiab lwm qhov yog femtosecond laser ablation hauv iav los yog yas hauv dej distilled kom tshem tawm cov khib nyiab. Lwm txoj hauv kev yog kom tshuab raws rau hauv cov iav saum npoo thiab kaw lawv nrog lub iav npog ntawm femtosecond laser vuam.
Daim duab 6. Femtosecond laser-induced xaiv etching los npaj microfluidic raws hauv cov ntaub ntawv iav
07 Micro drilling ntawm injector nozzle
Femtosecond laser microhole machining tau hloov micro-EDM ntawm ntau lub tuam txhab nyob rau hauv lub siab-siab injector kev ua lag luam vim yooj yim dua nyob rau hauv kev hloov pauv qhov ntws profiles thiab luv machining lub sij hawm. Lub peev xwm los tswj txoj haujlwm ua kom pom tseeb thiab qaij ntawm lub nqaj los ntawm lub taub hau scan ua ntej tau coj mus rau kev tsim cov duab ntawm aperture (piv txwv li, chim, flare, convergence, divergence) uas tuaj yeem txhawb nqa atomization lossis kev nkag mus rau hauv lub combustion chamber. Drilling lub sij hawm nyob ntawm qhov ntim ablation, nrog laum thickness ntawm 0.2 - 0.5 hli thiab lub qhov taub ntawm 0.12 - 0.25 hli, ua cov txheej txheem no kaum zaus sai dua micro-EDM. Microdrilling yog ua nyob rau hauv peb theem, nrog rau kev ntxhib los mos thiab ua tiav ntawm qhov kev tsav dav hlau. Argon yog siv los ua ib qho khoom siv roj los tiv thaiv lub borehole los ntawm oxidation thiab tiv thaiv lub plasma zaum kawg thaum pib theem.
Daim duab 7. Femtosecond laser high-precision ua ntawm inverted taper qhov rau diesel cav injector
08 Ultra-ceev laser texturing
Nyob rau hauv xyoo tas los no, txhawm rau txhim kho qhov tseeb ntawm machining, txo cov khoom puas tsuaj, thiab ua kom ua tau zoo, kev ua haujlwm ntawm micromachining tau maj mam dhau los ua qhov tseem ceeb ntawm cov kws tshawb fawb. Ultrafast laser muaj ntau yam kev ua tau zoo xws li kev puas tsuaj tsawg thiab siab precision, uas tau dhau los ua qhov tseem ceeb ntawm kev txhawb nqa kev tsim cov tshuab ua haujlwm. Nyob rau tib lub sijhawm, ultrafast lasers tuaj yeem ua rau ntau yam khoom siv, thiab laser ua cov khoom puas tsuaj kuj yog ib qho kev tshawb fawb loj. Ultrafast laser yog siv los ablate cov ntaub ntawv. Thaum lub zog ceev ntawm lub laser yog siab tshaj qhov pib ntawm ablation ntawm cov khoom, qhov saum npoo ntawm cov khoom ablated yuav qhia ib tug micro-nano qauv nrog tej yam ntxwv. Kev tshawb fawb qhia tau hais tias qhov tshwj xeeb nto Structure yog ib qho tshwm sim uas tshwm sim thaum laser ua cov ntaub ntawv. Kev npaj ntawm deg micro-nano cov qauv tuaj yeem txhim kho cov khoom ntawm cov khoom nws tus kheej thiab tseem tuaj yeem pab txhim kho cov ntaub ntawv tshiab. Qhov no ua rau kev npaj ntawm qhov chaw micro-nano cov qauv los ntawm ultrafast laser txoj kev nrog kev txhim kho tseem ceeb. Tam sim no, rau cov ntaub ntawv hlau, kev tshawb fawb ntawm ultrafast laser nto texturing tuaj yeem txhim kho cov hlau nto ntub dej, txhim kho qhov sib txhuam thiab hnav cov khoom, txhim kho txheej adhesion, thiab kev taw qhia kev loj hlob thiab adhesion ntawm cov hlwb.
Daim duab 8. Superhydrophobic zog ntawm laser-npaj silicon nto
Raws li kev siv thev naus laus zis thev naus laus zis, kev ua laser ultrafast muaj cov yam ntxwv ntawm thaj chaw me me ntawm cov cua sov, cov txheej txheem tsis-linear ntawm kev sib cuam tshuam nrog cov ntaub ntawv, thiab kev daws teeb meem siab tshaj qhov kev txwv tsis pub dhau. Nws tuaj yeem paub qhov ua tau zoo thiab siab-precision micro-nano ua ntawm ntau yam ntaub ntawv. thiab peb-dimensional micro-nano qauv fabrication. Ua tiav laser kev tsim khoom ntawm cov khoom tshwj xeeb, cov txheej txheem nyuaj thiab cov cuab yeej tshwj xeeb qhib txoj hauv kev tshiab rau kev tsim micro-nano. Tam sim no, femtosecond laser tau siv dav hauv ntau qhov kev tshawb fawb txog kev lag luam: femtosecond laser tuaj yeem siv los npaj ntau yam khoom siv kho qhov muag, xws li microlens arrays, bionic compound ob lub qhov muag, optical waveguides thiab metasurfaces; siv nws cov high precision, siab daws teeb meem thiab Nrog peb-dimensional ua muaj peev xwm, femtosecond laser yuav npaj los yog integrate microfluidic thiab optofluidic chips xws li microheater Cheebtsam thiab peb-dimensional microfluidic raws; Tsis tas li ntawd, femtosecond laser kuj tseem tuaj yeem npaj ntau hom deg micro-nanostructures kom ua tiav los tiv thaiv kev cuam tshuam, tiv thaiv kev cuam tshuam, super-hydrophobic, tiv thaiv icing thiab lwm yam haujlwm; Tsis tas li ntawd xwb, femtosecond laser kuj tau siv rau hauv thaj chaw biomedicine, uas qhia txog kev ua tau zoo hauv thaj chaw xws li biological micro-stents, cell culture substrates thiab biological microscopic imaging. Kev thov dav dav. Tam sim no, daim ntawv thov teb ntawm femtosecond laser ua yog nthuav tawm xyoo los ntawm xyoo. Ntxiv nrog rau cov lus hais saum toj no, micro-optics, microfluidics, ntau lub luag haujlwm micro-nanostructures thiab biomedical engineering applications, nws kuj tseem ua lub luag haujlwm loj hauv qee qhov kev tshwm sim, xws li kev npaj metasurface. , micro-nano manufacturing thiab multi-dimensional kho qhov muag cov ntaub ntawv cia, thiab lwm yam.
Post lub sij hawm: Apr-17-2024
